Microfabrication Fundamental Processes

Thin-film deposition, lithography, and etching form the most fundamental processes used in microfabrication to create devices. This course introduces these processes, providing learners with an understanding of the techniques, physical phenomena, and material properties that inform fabrication decisions. This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course. Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.